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AMAT 0200-02730
Product Name: 200mm Quartz Focus Ring/Shield Assembly
Product Description: A high-purity fused quartz component that surrounds the wafer pedestal. It focuses plasma towards the wafer, protects the chamber wall, and ensures uniform plasma distribution across the 200mm wafer surface.
Technical Specifications:
- Material: High-purity synthetic fused silica (quartz, >99.998% SiO₂)
Detailed content
- Wafer Compatibility: 200mm (8-inch)
- Dimensions: 280mm OD x 210mm ID x 15mm thick
- Temperature Rating: Up to 1100°C continuous
- Surface Finish: Fire-polished & acid-etched
- Flatness: < 15 μm across sealing surfaces
- Purity: Ultra-low metallic impurities (ppb level)
Key Features:
- Inert to all fluorine/chlorine plasma chemistries
- High transparency for in-situ process monitoring
- Excellent thermal shock resistance
- Minimizes particle contamination
- Precision profile optimizes plasma uniformity
Application Scenarios:
Deployed in AMAT Centura dielectric etch, metal etch, and PECVD chambers. Essential for processes requiring high-purity, non-contaminating plasma confinement.
