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AMAT 0200-02577
Product Name: 200mm Ceramic Lift Pin Plate / Wafer Lift Assembly
Product Description: A high-performance ceramic component designed to support and vertically lift 200mm wafers within semiconductor process chambers. It integrates precision lift pins to safely raise wafers off the electrostatic chuck (ESC) for robot transfer.
Technical Specifications:
- Wafer Size: 200mm (8-inch).
Detailed content
- Material: High-purity alumina (Al₂O₃) ceramic.
- Construction: One-piece machined plate with integrated, precision ceramic lift pins.
- Flatness: Ultra-flat surface to ensure stable wafer support and parallel lifting.
- Pins: Three or four symmetrically placed lift pins for balanced wafer elevation.
Functional Features:
- Excellent electrical isolation to prevent interference with the electrostatic chuck.
- Exceptional chemical resistance to plasma, process gases, and cleaning chemistries.
- Zero particle generation due to the non-porous ceramic structure.
- High mechanical strength and thermal shock resistance for millions of lift cycles.
Application Scenarios:
- Used in AMAT Centura, Producer, and Endura platforms for 200mm wafer handling.
- Installed in CVD, PVD, and Etch chambers for reliable wafer lift-off and transfer.
