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AMAT 0200-02576
Product Name: 200mm Fixed Lift Pin Lift Ring Assembly
Product Introduction: A precision lift ring assembly with fixed lift pins, designed for 200mm wafer semiconductor process chambers to enable safe and precise wafer lifting and positioning.
Technical Specifications:
- Wafer Size Compatibility: 200mm (8-inch) wafer processing systems
Detailed content
- Lift Pin Configuration: Fixed-position lift pins for stable wafer support
- Material: High-purity ceramic or metal alloy for cleanroom compatibility
- Surface Finish: Ultra-smooth to minimize particle adhesion and wafer damage
- Dimensional Tolerance: Precision machining for exact chamber fit
Functional Features:
- Stable and precise lifting of 200mm wafers during process cycles
- Fixed pin design ensures consistent wafer positioning and alignment
- Minimizes particle generation and wafer contamination risks
- Resists chemical attack from process gases and cleaning solutions
- Easy installation and replacement during chamber maintenance
Application Scenarios:
- Wafer lifting and positioning in 200mm semiconductor process chambers
- Lift ring assembly for AMAT Producer series CVD systems
- Critical component for wafer handling in PVD and etch processes
- Replacement lift ring for 200mm wafer fabrication equipment maintenance
