Digital guide
You are here:
AMAT 0200-02067
Brand & Part Number: Applied Materials (AMAT) 0200-02067
Product Name: Electrostatic Chuck (ESC) Focus Ring
Product Description: A precision-machined annular component surrounding the electrostatic chuck to optimize plasma distribution, protect wafer edges, and ensure process uniformity.
Detailed content
Technical Specifications:
- Material: Silicon carbide (SiC) or high-purity alumina ceramic
- Outer Diameter: Compatible with 200mm wafer processes
- Flatness: Total Thickness Variation < 8 μm
- Surface Finish: Ra ≤ 0.8 μm
- Temperature Resistance: Up to 600°C
- Dielectric Strength: > 15 kV/mm
Functional Features:
- Excellent plasma and chemical corrosion resistance
- Uniform thermal conductivity for stable process temperatures
- Precision profile to improve wafer edge processing uniformity
- Low particle emission to enhance production yield
- High dielectric strength for electrical isolation
Application: Installed around electrostatic chucks in PVD and Etch chambers to improve process consistency and wafer uniformity.
