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AMAT 0200-00317
roduct Name: 200mm Bottom Isolator / Pumping Ring
Product Description: A high-purity ceramic ring installed at the base of a process chamber. It provides electrical isolation and defines the pumping path for process gases and byproducts.
Technical Specifications:
- Wafer Size: 200mm (8-inch).
- Material: High-purity alumina (Al₂O₃) ceramic.
Detailed content
- Function: Electrical isolation and gas flow management.
- Surface: Smooth, non-porous finish to minimize particle trapping.
- Fit: Precision-machined for Producer series chambers.
Functional Features:
- Excellent dielectric strength for high-voltage RF isolation.
- Chemically inert to resist etching and deposition.
- Optimized internal geometry for efficient pumping and uniform gas distribution.
- Low outgassing for UHV compatibility.
Application Scenarios:
- Installed in AMAT Producer CVD chambers.
- Sits beneath the wafer pedestal to isolate it from the grounded chamber body.
