Digital guide
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Technical Specifications:
- RF Frequency: 13.56 MHz
- Power Handling: Up to 5 kW
- Control: Stepper motor driven (3 axes)
- Interface: Analog (0–10 V) + Digital (RS-232)
- Supply Voltage: 24 VDC
Functional Features:
- Fast, automatic tuning algorithm
- Closed-loop power and reflection control
- Over-voltage and over-power protection
- Non-volatile memory for recipe storage
- Status and fault diagnostics via LED indicators
Application: Integral component of RF plasma generators in PECVD, Etch, and PVD chambers.
