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AMAT 0190-77389 High-Precision Optical Fiber Thermometer Assembly
Product Overview: The AMAT 0190-77389 is a high-precision optical fiber thermometer assembly designed for temperature monitoring in Applied Materials semiconductor processing equipment. It provides accurate, real-time temperature measurements of critical components such as process chambers, wafers, and heaters, ensuring optimal process control and component protection. This assembly leverages advanced optical fiber technology to withstand high temperatures, plasma exposure, and electromagnetic interference, making it ideal for the harsh environments of semiconductor fabs. It integrates seamlessly with AMAT’s equipment control systems, enabling closed-loop temperature control and process optimization.
Technical Specifications: – Temperature Range: -50°C to 800°C, covering the full range of temperatures encountered in semiconductor processing. – Accuracy: ±0.5°C (at 0-500°C), ensuring precise temperature measurement for process control. – Response Time: ≤10ms, providing real-time temperature feedback to the equipment control system. – Optical Fiber Type: Single-mode fiber with a core diameter of 10μm, ensuring minimal signal loss and high measurement stability.
Detailed content
– Probe Material: High-purity alumina ceramic, resistant to plasma erosion and high temperatures. – Connection Type: FC/PC optical connector, compatible with AMAT’s standard optical measurement systems. – Operating Environment: Resistant to plasma exposure (compatible with CF₄, Cl₂, and other process gases) and electromagnetic interference (EMI). – Power Supply: 24V DC, power consumption ≤5W. – Certification: Complies with SEMI S2/S8 safety standards and ISO 17025 calibration requirements.
Functional Features: – Provides accurate, real-time temperature measurements of critical equipment components, enabling precise process control. – Resists plasma erosion and high temperatures, ensuring reliable performance in harsh fab environments. – Immune to electromagnetic interference, eliminating measurement errors caused by nearby RF power sources. – Integrates seamlessly with AMAT’s equipment control systems, enabling closed-loop temperature regulation. – Features a compact, rugged design that fits into tight equipment spaces, such as process chamber interiors. – Includes built-in self-calibration functionality, ensuring long-term measurement accuracy without frequent manual calibration. – Provides alarm outputs for abnormal temperature conditions, preventing component damage and process defects.
Application Scenarios: – Installed in AMAT’s Centura and Endura series process chambers to monitor wafer and chamber wall temperatures. – Used in CVD, PECVD, and plasma etching systems to ensure optimal process temperatures. – Applied in heater assemblies to monitor and regulate heating element temperatures, preventing overheating. – Suitable for 200mm and 300mm wafer manufacturing processes, including advanced technology nodes (≤7nm). – Ideal for high-volume production fabs, where process consistency and component protection are critical. – Used in research and development facilities to study temperature effects on semiconductor processes.
