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AMAT 0190-62183
Product Name: Capacitance Manometer Module
Product Description: A high-precision capacitance manometer designed for absolute pressure measurement in semiconductor vacuum processing systems. It provides stable and accurate pressure readings across a wide vacuum range.
Technical Specifications:
- Measurement Range: 1 mTorr to 1000 Torr
Detailed content
- Accuracy: ±0.2% full-scale
- Output Signal: 0–10V analog or 4–20mA current loop
- Power Supply: 24V DC
- Operating Temperature: 0°C to +50°C
- Media Compatibility: Inert gases, process gases, and clean dry air
- Leak Rate: <1×10⁻⁹ atm-cc/sec He
Functional Features:
- Excellent long-term stability and repeatability
- Built-in temperature compensation for accuracy
- Over-pressure protection up to 10x full-scale
- Low hysteresis and fast dynamic response
- Hermetically sealed sensor for harsh environments
- Calibrated for direct integration with AMAT vacuum systems
Application Scenarios:
- Vacuum chamber pressure monitoring and control
- Process gas line pressure regulation
- Cryogenic pump and turbo pump monitoring
- Semiconductor etch and deposition process control
- Cleanroom utility vacuum systems
