Digital guide
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AMAT 0190-49444
- Brand & Part Number: Applied Materials (AMAT) 0190-49444
- Product Name: High-Power DC Power Supply Module
- Product Description: A high-performance, high-power direct current power supply module engineered for semiconductor manufacturing equipment. It delivers stable, low-ripple DC power to high-demand subsystems including plasma generators, electrostatic chucks (ESC), and high-power heater assemblies.
Detailed content
- Technical Specifications:
- Input Voltage: 200–240V AC, 3-phase
- Output Voltage: 0–60V DC (adjustable)
- Output Current: Maximum 100A
- Ripple & Noise: ≤ 0.05% of full output
- Regulation: Line/Load regulation ≤ 0.3%
- Efficiency: ≥ 88% at full load
- Protection: Over-voltage, over-current, over-temperature, short-circuit
- Operating Temperature: 0°C to +50°C
- Functional Features:
- Ultra-low ripple ensures stable plasma and ESC operation
- High efficiency minimizes heat generation and energy consumption
- Active current sharing for parallel operation capability
- Remote analog/digital control interface for system integration
- Comprehensive fault detection and status reporting
- Compact rack-mount design for standard equipment cabinets
- Applications:
- High-power electrostatic chuck (ESC) biasing in PVD/CVD chambers
- Plasma generation and biasing in etch and deposition systems
- High-power heater control in thermal processing chambers
- AMAT Centura, Endura, and Producer high-power subsystems
