Digital guide
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AMAT 0190-47186
Product Name: Linear Actuator Assembly with Integrated Servo Motor & Sensor
Product Description: A compact, high-precision linear drive assembly integrating a servo motor, drive mechanism, and position sensor for controlled linear motion in vacuum and industrial environments.
Technical Specifications:
- Motor: Yaskawa SGMM-A2C3YA21 servo motor, 24V DC, 3000rpm
Detailed content
- Sensor: EE-SX872 optical encoder for position feedback
- Stroke Range: Programmable linear travel up to 50mm
- Load Capacity: Maximum dynamic thrust 50N
- Weight: 1.75 kg
Functional Features:
- Provides highly repeatable linear positioning with micron-level accuracy.
- Non-contact optical sensor ensures reliable position feedback without wear.
- Compact, lightweight design suitable for integration into tight chamber spaces.
- Sealed construction resists dust, moisture, and particulate contamination.
Application Scenarios: Precision shutter control, wafer lift mechanisms, and variable gap adjustment in process chambers.
