Digital guide
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AMAT 0190-36349
Product Name: Cyclic Heating Lamp Assembly
Product Description: A high-output, single-ended infrared heating lamp designed for rapid thermal processing (RTP) in semiconductor manufacturing. It delivers precise, cycled heat for wafer annealing and deposition processes.
Technical Specifications:
- Input Voltage: 480V AC
Detailed content
- Power Rating: 500W
- Lamp Type: JID82V tungsten-halogen cyclic lamp
- Construction: Seamless quartz envelope with nickel-plated brass terminals
- Length: Standard 150mm (6-inch)
- Weight: 0.05kg
Functional Features:
- Rapid Heating: Fast warm-up and cool-down for precise thermal cycling
- High Efficiency: Concentrated infrared radiation for uniform wafer heating
- Long Life: Rugged design for extended operation in high-temperature vacuum chambers
- Precision Output: Stable spectral output for consistent process results
Application: Used in AMAT RTP 300mm chambers for rapid thermal annealing, oxidation, and chemical vapor deposition.
