Digital guide
You are here:
AMAT 0190-35521
Product Name: RF Match Network Variable Capacitor Assembly
Product Description: A high‑power vacuum variable capacitor used within RF impedance matching networks to adjust capacitance dynamically and maintain optimal power transfer to plasma loads.
Technical Specifications:
- Capacitance Range: 10–500 pF
Detailed content
- Voltage Rating: 5kV RMS continuous
- Current Rating: 50A RMS
- Insulation: Vacuum‑sealed ceramic enclosure
- Operating Frequency: 13.56 MHz / 27.12 MHz
- Drive Type: Gear‑driven manual/auto positioning
Functional Features:
- Provides stable capacitance adjustment under high RF power
- Low loss factor for high‑efficiency energy transfer
- Excellent thermal stability during continuous operation
- High voltage insulation to prevent arcing
- Precision tuning for consistent plasma impedance matching
Application Scenarios: Used in 13.56 MHz and 27.12 MHz RF match networks in etch and PECVD chambers.
