Digital guide
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AMAT 0190-35252
Product Name: Chamber Pneumatics Assembly
Product Description: A pre-assembled manifold system that integrates pneumatic valves, regulators, and sensors to control all pneumatic actuators within a process chamber.
Technical Specifications:
- Valves: 4-port, 2-position solenoid valves (24V DC)
Detailed content
- Supply Pressure: 80-100 PSIG factory air
- Materials: 316L stainless steel, PTFE seals
- Configuration: Multi-station manifold with integrated pressure sensors
- Mounting: Flange-mount for chamber interface
Functional Features:
- Centralized control of all chamber pneumatic functions (gates, lifts, shutters).
- Integrated pressure monitoring for system diagnostics.
- Pre-plumbed and tested, reducing installation time and leaks.
- Compact design optimized for chamber mounting.
Application Scenarios: Pneumatic actuation control for slit valves, wafer lifts, and gas line shut-off valves in PVD/CVD chambers.
