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AMAT 0190-21303
Product Name: RF Match Cable Assembly (Preclean 2, 0.5M)
Product Description: A specialized high-frequency RF (Radio Frequency) cable assembly designed for connecting RF match networks to process chambers in semiconductor pre-clean systems.
Technical Specifications:
- Length: 0.5 meters.
- Connector Type: High-performance, vacuum-compatible RF connectors (TRU-7684).
Detailed content
- Cable Type: Low-loss, high-voltage RF coaxial cable with PTFE insulation.
- Voltage Rating: Suitable for high-voltage RF plasma environments.
- Weight: 0.315 kg.
Functional Features:
- Low signal attenuation and excellent impedance matching for efficient RF power transfer.
- High voltage insulation and arc resistance for plasma process environments.
- Flexible, durable construction with high flex life for repeated use.
- Vacuum-outgassing compliant materials for UHV (Ultra-High Vacuum) compatibility.
Application Scenarios:
- Used in AMAT Preclean II systems for RF power delivery to plasma chambers.
- Applied in semiconductor wafer surface preparation and oxide removal processes.
