Digital guide
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Detailed content
Technical Specifications:
- Pressure Range: 1,000 Torr to 10⁻⁹ Torr
- Gauge Type: Dual-channel (Convection / Hot Cathode Ion)
- Output: Analog (0–10 VDC) + Digital (RS-485)
- Supply Voltage: 115/230 VAC
- Control: Auto-ranging / auto-protection
Functional Features:
- Automatic gauge filament protection
- Wide pressure measurement coverage
- High stability and low noise
- Interlock signals for process safety
- Compatible with all standard AMAT vacuum gauges
Application: Monitors and controls chamber vacuum levels in Etch, PVD, and CVD process chambers.
