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AMAT 0190-19374 High-Power Industrial Lamp Assembly
Product Description: A 120V, 2100W linear quartz halogen lamp assembly engineered for rapid thermal processing (RTP) and wafer heating applications in semiconductor fabrication.
Technical Specifications:
- Voltage: 120V AC
- Power Rating: 2100W
- Lamp Type: Single-ended quartz halogen
- Filament Material: Tungsten
Detailed content
- Bulb Envelope: UV-blocking fused quartz
- Base Type: Ceramic R7s double-ended
- Lifetime: 2,000 hours (typical operation)
- Color Temperature: 3200K
- Dimensions: 118mm (length) × 12mm (diameter)
- Operating Pressure: Atmospheric
Functional Features:
- Instant-on capability with full radiant output within 2 seconds
- Uniform heat distribution across wafer surface for consistent processing
- High radiant efficiency converting >90% of electrical energy to infrared radiation
- Quartz envelope resists thermal shock and chemical contamination
- Stable output throughout lifespan with minimal lumen depreciation
- Compatible with standard AMAT lamp housing assemblies
Application Scenarios:
- Rapid Thermal Processing (RTP) systems for wafer annealing
- Pre-clean chambers for wafer heating prior to deposition
- Photoresist curing and solvent evaporation stations
- Thermal assist in PVD and ALD process chambers
- Wafer bake modules in lithography clusters
