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AMAT 0190-16177 Wafer Position Sensor Assembly
Product Description: A non-contact optical sensor system designed for precise detection and verification of wafer position in semiconductor handling and processing equipment. It ensures accurate wafer placement and prevents processing errors.
Technical Specifications:
- Sensing Principle: Reflective optical triangulation
- Detection Range: 5–50mm
- Resolution: 0.1mm
Detailed content
- Response Time: <1ms
- Light Source: Infrared LED (880nm)
- Output: NPN/PNP configurable, 0–10V analog
- Supply Voltage: 24V DC ±10%
- Operating Temperature: 0–50°C
- Enclosure Rating: IP65
- Materials: Stainless steel housing, borosilicate glass lens
Functional Features:
- High-precision wafer edge detection for 200mm and 300mm wafers
- Immunity to ambient light interference
- Teach-in function for simplified setup and calibration
- Built-in diagnostics for sensor health monitoring
- Compact design for installation in tight spaces
- Shock and vibration resistance for robust operation
- Compatibility with standard AMAT robot controllers
Application Scenarios:
- Wafer presence detection in load ports and cassettes
- Wafer centering verification in transfer chambers
- Pre-aligner position feedback systems
- End-effector position verification in wafer handling robots
- Process chamber entry/exit monitoring
