Digital guide
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AMAT 0190-11933
Product Name: Fluid Flow Switch Assembly
Product Description: A precision flow monitoring device designed to detect and control fluid (liquid or gas) flow rates in semiconductor equipment utility systems.
Technical Specifications:
- Media Compatibility: Deionized water, process gases, chemical coolants
Detailed content
- Flow Range: Custom calibrated for specific semiconductor applications
- Operating Pressure: Up to 150 PSI
- Temperature Range: -20°C to +85°C
- Connection Type: Standard VCR or compression fittings
- Output: Digital switch signal (NPN/PNP configurable)
Functional Features:
- Adjustable flow threshold settings for precise monitoring
- Fast response time to flow rate changes
- Visual flow status indication via integrated LED
- Corrosion-resistant wetted materials for chemical compatibility
- Alarm output for abnormal flow conditions
- Compact design for space-constrained installations
Application Scenarios:
- Cooling water systems for RF generators and process chambers
- Chemical delivery and distribution lines
- Process gas supply monitoring
- Vacuum pump exhaust flow verification
- Waste chemical disposal systems
