Digital guide
You are here:
AMAT 0190-09378
Product Name: RF Match Network Assembly
Product Description: An automatic impedance matching network that efficiently couples RF power from the generator to the plasma load, ensuring maximum power transfer.
Technical Specifications:
- Frequency: 13.56 MHz (standard), with options for 27.12 MHz or 400 kHz.
Detailed content
- Power Rating: 1kW to 5kW.
- Components: Vacuum variable capacitors, high-power RF inductors.
- Control: Servo-motor driven automatic tuning.
Functional Features:
- Auto-Tuning: Rapidly adjusts impedance to maintain a perfect match under varying process conditions.
- High Efficiency: Minimizes reflected power, maximizing energy delivered to the plasma.
- Stability: Provides consistent plasma ignition and stability.
- Remote Control: Interface with the system’s main controller for recipe integration.
Application: Essential for RF-driven processes including Plasma Etch, PECVD, and Sputter Deposition across all AMAT platforms.
