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AMAT 0190-00318 Turbo Pump Controller Module
Product Introduction: This is a special digital controller for turbo molecular pump, which is used to drive, control and protect the turbo pump in semiconductor vacuum system. It can realize the stable operation of the turbo pump from start-up to high-speed rotation, monitor the working state in real time, ensure the safe and reliable acquisition of high vacuum, and is the core control component of the semiconductor vacuum system.
Technical Specifications:
- Applicable Pump: AMAT Turbo-V® 700/1000 series turbo molecular pump
- Speed Control Range: 0–72,000 RPM stepless adjustment
Detailed content
- Drive Power: 0–5 kW
- Control Interface: Analog 0–10 VDC, digital Ethernet/IP
- Protection Function: Over-speed, over-temperature, vibration, over-current protection
- Working Temperature: 0–40°C
- Installation: 19-inch rack-mounted, IP20 protection
Functional Features:
- Closed-loop speed control, ensuring stable vacuum degree
- Real-time monitoring of speed, temperature, vibration and current
- Automatic slow start and slow stop, reducing mechanical stress and prolonging service life
- Complete fault diagnosis and code display, convenient for quick maintenance
- Good compatibility with semiconductor vacuum system and host computer software
- High stability, suitable for long-term continuous operation in mass production
Application Scenarios:
- High vacuum system of semiconductor etching and deposition equipment
- Vacuum pumping of wafer transmission chamber and load lock chamber
- Vacuum system of precision testing and metrology equipment
- R&D vacuum platform and industrial vacuum system
- Supporting control of turbo molecular pump in semiconductor factory
