Digital guide
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AMAT 0190-00003
- Brand & Part Number: Applied Materials (AMAT) 0190-00003
- Product Name: High-Voltage Power Supply Module
- Product Description: A compact, high-reliability high-voltage power supply module designed to provide stable DC voltage for biasing and electrostatic applications in semiconductor process chambers.
Detailed content
- Technical Specifications:
- Output Voltage: 0–5 kV DC (adjustable)
- Output Current: Maximum 10 mA
- Input Voltage: 24V DC
- Ripple & Noise: ≤ 0.1% of output voltage
- Regulation: Line and load regulation ≤ 0.5%
- Protection: Over-voltage, over-current, and thermal shutdown
- Isolation: Input-output isolation ≥ 6 kV
- Functional Features:
- Ultra-low ripple ensures stable process conditions
- Precision voltage adjustment for process optimization
- Comprehensive protection circuits for reliable operation
- Compact design for integration in tight equipment spaces
- Current limiting prevents damage to chamber components
- High efficiency minimizes heat generation
- Applications:
- Electrostatic chuck (ESC) biasing in PVD/CVD chambers
- Plasma process biasing for etch and deposition control
- High-voltage applications in AMAT Centura and Endura platforms
- Wafer clamping and charge control systems
