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AMAT 0150-16078
Product Name: RF Generator Control Cable Assembly
Product Description: A specialized cable that carries analog and digital control signals between the main system controller and the RF power generator, ensuring stable plasma ignition and operation.
Technical Specifications:
- Type: Low-capacitance, double-shielded coaxial & multi-conductor composite cable.
Detailed content
- Bandwidth: Supports high-frequency control signals up to 100MHz.
- Insulation: Low-loss PTFE dielectric.
- Connectors: Combination of D-Sub and RF coaxial connectors (BNC/SMA).
- Length: Custom length for specific chamber-to-generator distance.
Functional Features:
- Signal Integrity: Superior shielding eliminates RF feedback and electromagnetic noise.
- High Stability: Ensures consistent RF power delivery and matching.
- Durability: High flex life and resistance to thermal stress.
- Grounding: Integrated low-impedance ground path for safety.
Application: Essential for RF-driven processes (Etch, PECVD, PVD) connecting the system host to RF generators (e.g., AE, MKS, Daihen).
