Digital guide

You are here:

AMAT 0150-09583

Brand & Part Number: Applied Materials (AMAT) 0150-09583

Product Name: High-Voltage RF Cable Assembly

Product Description: A shielded RF power transmission cable designed for low-loss delivery of high-frequency power to plasma process chambers.

Detailed content

Technical Specifications:
  • Cable Type: Double-shielded low-loss RF coaxial cable
  • Impedance: 50 ohms nominal
  • Voltage Rating: 5,000V AC RMS
  • Frequency Range: DC to 40 MHz
  • Connector Type: N-type male / HN-type female
  • Length: 2.0 meters
  • Conductor: Silver-plated copper center conductor
  • Shielding: Dual-layer braided shield (100% coverage)
  • Operating Temperature: -20°C to +125°C

    Functional Features:

  • Ultra-low signal attenuation for efficient power transfer
  • Multi-layer shielding to prevent RF leakage and EMI interference
  • High-voltage insulation for safe operation in plasma environments
  • Flexible design with high flex-life for dynamic installations
  • Gold-plated contacts for reliable signal transmission
  • Vacuum-compatible materials for sub-fab installation

    Application: Connects RF generators to matching networks and chamber electrodes in Etch and PVD systems.

You may also like