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AMAT 0150-04723
Product Name: Wafer Transfer Robot Blade and End Effector
Product Introduction:
This component is part of the factory automation or internal tool handling system (e.g., on an Endura cluster tool or a standalone clean track). The “Blade” is the flat, extended arm that slides under the wafer. The “End Effector” is the mechanism at the tip of the blade that holds the wafer. It typically uses vacuum channels or mechanical fingers to secure the wafer during transport between cassettes, aligners, and process chambers.
Technical Specifications:
- Material: PEEK (Polyether ether ketone), PFA, or Carbon Fiber composite for low particle generation and high stiffness.
Detailed content
- Vacuum Ports: Precision-drilled holes connected to an internal vacuum channel.
- Actuation: Pneumatic or electric motor-driven lift/rotate mechanisms.
- Alignment Features: Hard stops or kinematic mounts for precise wafer centering (±0.5mm accuracy).
- Sensors: Integrated optical or capacitive sensors to detect “Wafer Present” or “Wafer Missing.”
Functional Features:
- Particle Minimization: Smooth surfaces and non-marking materials prevent scratching or contaminating the wafer backside.
- High-Speed Transfer: Lightweight composite construction allows for rapid acceleration/deceleration to maximize tool throughput (wafers per hour).
- Vacuum Hold: Maintains secure hold even during vertical orientation changes.
- Edge Grip: Some designs grip only the wafer edge (3mm) to avoid covering active device areas.
- Thermal Stability: Low thermal expansion materials prevent misalignment during temperature changes.
Application Scenarios:
- Cluster Tool Integration: Moving wafers between PVD, CVD, and Etch modules without breaking vacuum.
- Load Lock Transfer: Moving wafers from atmospheric pressure cassettes into the vacuum load lock.
- Metrology/Inspection: Transporting wafers to review stations (CD-SEM, ellipsometers).
- Sorter/Buffer: Storing wafers in buffer stations to decouple process module cycle times.
- 300mm/200mm Handling: Specific blades designed for different wafer size standards.
