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AMAT 0140-70093
Product Name: Pump Interconnect Cable Assembly
Product Description: A high-performance electrical cable assembly designed for reliable signal and power transmission between vacuum pumps and the main control unit in semiconductor processing equipment.
Technical Specifications:
- Material: High-purity, low-outgassing insulation and jacketing (FEP/PFA) for vacuum compatibility.
Detailed content
- Conductors: Multi-strand tinned copper for flexibility and corrosion resistance.
- Connectors: Precision-machined, gold-plated contacts ensuring low contact resistance.
- Voltage Rating: Standard 600V.
- Temperature Range: -40°C to +105°C.
- Length: Custom-engineered for specific tool interfaces.
Functional Features:
- EMI/RFI Shielding: Multi-layer braided shielding to prevent electromagnetic interference.
- Vacuum Compatibility: Low particle generation and outgassing, suitable for UHV environments.
- Durability: High flex-life, resistant to thermal cycling and chemical exposure.
Application: Used in AMAT Centura, Endura, and Producer series platforms for interconnecting turbo-molecular and roughing pumps.
