Digital guide
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AMAT 0140-20183
Product Introduction:
The Chamber Liner is a replaceable protective shell that lines the interior walls of the vacuum chamber. It protects the expensive main chamber body (usually stainless steel) from plasma sputtering, chemical corrosion, and thermal stress. Liners also act as a ground plane and can influence plasma uniformity.
Technical Specifications:
- Material: Anodized Aluminum, Yttrium (Y2O3) coated Aluminum, or Quartz 1.
Detailed content
- Shape: Cylindrical sleeve with cutouts for gas injection and viewing ports.
- Thickness: Optimized for structural integrity and thermal mass.
- Surface Finish: Smooth, low-roughness finish to minimize particle accumulation.
Functional Features:
- Sacrificial Protection: Absorbs sputtering and chemical attack, extending the life of the main vacuum chamber.
- Particle Control: Smooth surfaces and coatings reduce the generation of micro-particles that can kill yield.
- Grounding: Provides a conductive path to ground for the plasma.
- Thermal Shielding: Protects chamber outer walls from excessive heat.
Application Scenarios:
- CVD Chambers: Protects against film deposition on chamber walls (flaking prevention).
- Etch Chambers: Protects against halogen corrosion and physical sputtering.
- PVD Chambers: Shields against target material sputter deposition.
- Maintenance: Regularly replaced during preventive maintenance (PM) cycles.
- Main Equipment: Applied Materials various process chambers.
