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AMAT 0140-12997
- Product Name: Harness Assembly, RF Chamber Interlock
- Product Description: Specialized cable assembly for RF chamber safety interlock systems, providing critical monitoring and control in high-power radio frequency environments.
- Technical Specifications:
- Conductor: 18 AWG stranded tinned copper
Detailed content
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- Shielding: Dual-layer braided shielding (95% coverage) for RF rejection
- Dielectric Voltage Withstanding: 5kV AC
- Operating Environment: Vacuum-compatible to 1×10⁻⁹ Torr
- Connector: Hermetically sealed RF-resistant connectors
- Bend Radius: Minimum 50mm for continuous flexing
- Functional Features:
- Provides fail-safe interlock signaling for RF chamber access doors
- Superior RF noise rejection maintains signal integrity in high-power environments
- Vacuum-compatible materials prevent contamination in process chambers
- High dielectric strength ensures safety during high-voltage operation
- Quick-disconnect connectors simplify chamber maintenance
- Application Scenarios:
- Installed in AMAT DPS, MxP, and etch chambers with RF sources
- Used in PECVD and PVD systems requiring high-power RF operation
- Deployed in safety interlock loops for semiconductor process chambers
- Applied in equipment requiring compliance with SEMI safety standards
