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AMAT 0140-02533
Product Name: Throttle Valve Body Assembly
Product Introduction: A precision valve used to control the pressure inside the vacuum chamber by regulating the pumping speed. It is a key component for maintaining process stability.
Technical Specifications:
- Type: Butterfly valve or Poppet valve.
- Size: 6-inch, 8-inch, or 12-inch nominal diameter.
- Material: Aluminum body with anodized coating; Seals made of Viton, Kalrez, or metal (for high temp).
Detailed content
- Actuator: Pneumatic or Stepper motor driven.
- Leak Rate: < 1 x 10^-6 Torr-L/sec (helium leak test).
- Position Feedback: LVDT or rotary encoder for 0-100% open/close indication.
Functional Features: - Fast Response: Capable of rapid opening/closing for dynamic pressure control during process transitions.
- Plasma Compatible: Internal surfaces are coated to resist fluoropolymer buildup and sputtering.
- Particle Generation: Low-friction design to minimize particle generation during movement.
- Interlock: Integrated sensors to confirm valve position before process initiation.
Application Scenarios: - Pressure Control: Maintains specific process pressures ranging from mTorr to Torr levels.
- Pump Isolation: Closes to isolate the chamber from the pump during maintenance or venting.
- Gas Flow Modulation: Works in conjunction with mass flow controllers to stabilize chamber dynamics.
