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AMAT 0140-00016

Product Name: Chamber Interlock Harness Assembly

Product Description: A specialized safety cable harness for managing door, lid, and access interlock signals in vacuum process chambers.

Technical Specifications:

  • Conductor: 20 AWG, stranded tinned copper.
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Detailed content

  • Insulation: Cross-linked polyethylene (XLPE).
  • Connector: MIL-DTL-38999 series (quadrax).
  • Voltage: 125V AC / DC.
  • Current: 5A.
  • Temperature: -55°C to +105°C.

    Functional Features:

  • Safety-rated for critical interlock circuits (Cat. 3, PL d).
  • High flex life for dynamic applications.
  • Chemical resistant jacket.
  • Keyed connectors to prevent mis-wiring.

    Application Scenarios: Ensures safe operation by cutting high voltage/power when chamber doors are open on Etch, PVD, and CVD tools.

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