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AMAT 0130-03170
Product Name: Precision Flow Meter Assembly
Product Description: A thermal mass flow meter designed for accurate measurement and monitoring of ultra-high purity gas flows in semiconductor process applications.
Technical Specifications:
- Flow Range: 0 to 10 SLM (standard liters per minute)
Detailed content
- Accuracy: ±1% full scale
- Repeatability: ±0.2% full scale
- Output Signal: 0-5V analog + digital RS-232
- Wetted Materials: 316L stainless steel, PTFE
- Pressure Rating: 150 PSIG
Functional Features:
- Direct mass flow measurement independent of temperature and pressure.
- Fast response time for real-time process monitoring.
- Low pressure drop minimizes impact on gas delivery systems.
- Calibrated for specific gases (Ar, N₂, H₂, O₂).
Application Scenarios: Monitoring process gas flows in CVD, ALD, and etching processes requiring precise flow control.
