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AMAT 0120-90146
Product Name: Gauge Controller Module (Vacuum / Pressure Control)
Product Description: An electronic module dedicated to interfacing, controlling, and reading vacuum gauges and pressure transducers. It provides precise vacuum measurement and control for process chambers.
Technical Specifications:
- Input Channels: Supports multiple gauge types: cold cathode, Pirani, and capacitance manometers.
Detailed content
- Communication: Analog (0-10V) and digital (DeviceNet, RS-485) outputs.
- Power Input: 24 VDC.
- Operating Temperature: 0°C to +60°C.
- Form Factor: Standard modular card for rack mounting.
Functional Features:
- Provides automatic gauge switching, ionization, and power control.
- Delivers high-accuracy pressure readings across high vacuum to atmosphere ranges.
- Built-in self-diagnosis and error reporting for troubleshooting.
- Seamless integration with the main system controller for closed-loop pressure control.
Application Scenarios:
- Manages vacuum measurement in all AMAT process chambers (Etch, PVD, CVD, ALD).
- Controls roughing and high vacuum pump sequences and interlocks.
