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AMAT 0100-90468
Brand & Part Number: Applied Materials (AMAT) 0100-90468
Product Name: Vacuum Gauge Control Board
Product Description: A dedicated signal processing and control printed circuit board used to drive, calibrate, and read vacuum pressure gauges in semiconductor process chambers.
Detailed content
Technical Specifications:
- Operating Voltage: 24V DC
- Compatible Gauge Types: Hot cathode ionization gauge, Pirani gauge, convection gauge
- Pressure Range Coverage: 1000 Torr down to 1×10⁻⁹ Torr
- Output Signals: 0–10V analog, RS-485 digital communication
- Isolation Voltage: 1500V DC channel-to-channel
Functional Features:
- Automatic filament protection to extend gauge service life
- Real-time pressure sampling and data filtering
- Built-in fault diagnosis and alarm output functions
- Stable signal output under strong electromagnetic interference
- Non‑volatile memory for storing calibration parameters
Application: Used in vacuum monitoring systems of Etch, PVD, CVD, and ALD chambers to ensure accurate pressure control during wafer processing.
