Digital guide
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AMAT 0100-20318
Product Introduction: This robot is designed for the automated handling of semiconductor wafers within the manufacturing environment. It ensures safe and efficient transfer of wafers between different processing stations, reducing the risk of contamination and damage.
Technical Specifications:
- Equipped with high – precision grippers that can handle wafers with diameters ranging from 100mm to 300mm.
- Has a repeatability of ±0.05mm in its movement, ensuring accurate placement of wafers.
Detailed content
- Operates in a cleanroom environment with a particle count of less than 100 particles per cubic foot (class 100 cleanroom).
Functional Features:
- Gentle Handling: The specialized grippers are designed to hold the wafers gently, minimizing the risk of breakage or surface damage.
- High Precision Movement: The accurate movement of the robot ensures that wafers are placed precisely at the required processing stations, improving the overall manufacturing efficiency.
- Cleanroom Compatibility: Can operate in a cleanroom environment, maintaining the cleanliness requirements of semiconductor manufacturing.
Application Scenarios:
- Used in semiconductor front – end manufacturing to transfer wafers between different process chambers such as deposition, etching, and photolithography.
- Employed in back – end manufacturing for handling wafers during packaging and testing processes.
- Integral part of automated wafer storage and retrieval systems in semiconductor factories.
