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AMAT 0100-09104
Product Name: Contactor Interlock Monitoring PCB Assembly
Product Description: A printed circuit board that monitors safety interlock circuits and controls power contactors in semiconductor equipment mainframes and process modules.
Technical Specifications:
- Inputs: 8 isolated interlock switch inputs (24V DC)
Detailed content
- Outputs: 4 relay outputs for contactor control
- Communication: Parallel I/O interface
- Form Factor: Standard VME 6U card
- Operating Temp: 0°C to +55°C
Functional Features:
- Provides fail-safe interlock monitoring to ensure operator safety.
- LED indicators for real-time status of each interlock channel.
- Over-voltage and reverse-polarity protection.
- Direct replacement for legacy interlock systems.
Application Scenarios: Safety interlock management for high-voltage power circuits in PVD, CVD, and Etch chambers.
