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AMAT 0100-01341
Product Name: TC AMP 300mm Thermocouple Amplifier Assembly
Product Description: A precision signal conditioning module designed to amplify and linearize low-level voltage signals from 300mm wafer process thermocouples. It converts millivolt-level thermocouple outputs into standardized, high-level analog or digital signals for accurate temperature monitoring and control in semiconductor vacuum chambers.
Detailed content
Technical Specifications:
- Input: Compatible with J, K, T, E type thermocouples
- Output: 0-10V DC / 4-20mA analog, or RS-485 digital
- Accuracy: ±0.1°C full-scale
- Gain: Programmable 100x to 10,000x
- Power Supply: 24V DC, 15W
- Operating Temperature: 0°C to +50°C
- Isolation: 1500V AC channel-to-ground
Functional Features:
- Cold-junction compensation for high measurement accuracy
- Built-in noise filtering for stable signal output in high EMI environments
- Short-circuit and reverse-polarity protection
- Compact, sealed metal enclosure for vacuum-compatible installation
- Plug-and-play design with industry-standard connectors
Application Scenarios: Real-time temperature monitoring for 300mm wafer pedestals, heater assemblies, and gas lines in Centura, Producer, and Endura PVD/CVD chambers.
