Digital guide
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AMAT 0090-A9871
- Brand & Part Number: Applied Materials (AMAT) 0090-A9871
- Product Name: PMT-100-3 Detector Assembly
- Product Description: A high-sensitivity photomultiplier tube (PMT) detector assembly designed for optical emission and plasma process monitoring in semiconductor manufacturing chambers. It precisely detects low-intensity optical signals for process endpoint detection and plasma state analysis.
Detailed content
- Technical Specifications:
- Detector Type: Single-stage photomultiplier tube (PMT)
- Spectral Response Range: 185nm to 900nm
- Gain: 10⁶ to 10⁷
- Housing: Machined aluminum with EMI shielding
- Input Interface: Optical fiber coupling (SMA 905)
- Output: Analog 0-10V DC + digital pulse
- Power Supply: ±12V DC, 5W
- Operating Temperature: 0°C to +50°C
- Functional Features:
- Ultra-high sensitivity detects faint plasma emission lines
- Wide spectral coverage for multiple process gas monitoring
- Low-noise electronics ensure signal integrity
- EMI-shielded housing eliminates electrical interference
- Stable performance in high-vacuum process environments
- Fast response time for real-time process endpoint detection
- Applications:
- Optical emission spectroscopy (OES) in etch and deposition chambers
- Plasma process endpoint detection for CVD, PVD, and etch
- AMAT Centura, Endura, and Producer platform process monitoring
- Real-time plasma state analysis and process control
