Digital guide
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AMAT 0090-09027
Product Name: VEXTA 2-Phase Stepping Motor
Product Introduction: A high-precision 2-phase stepping motor (Oriental Motor VEXTA PH264-01B) designed for precise motion control in semiconductor manufacturing equipment subsystems.
Technical Specifications:
- Motor Type: 2-phase bipolar stepping motor
Detailed content
- Step Angle: 1.8 degrees per full step (200 steps per revolution)
- Holding Torque: Optimized for semiconductor equipment motion requirements
- Voltage/Current: Customized for AMAT equipment control systems
- Shaft Configuration: Standard for direct mechanical coupling
- Weight: Lightweight design for integration into motion assemblies
Functional Features:
- High-precision positioning for semiconductor equipment motion systems
- Excellent step accuracy and repeatability for reliable operation
- Low vibration and noise for cleanroom-compatible performance
- Long service life with minimal maintenance requirements
- Compatibility with AMAT standard motion control electronics
Application Scenarios:
- Precision motion control in wafer handling and transfer systems
- Actuation for process chamber positioning mechanisms
- Replacement motor for AMAT semiconductor equipment motion systems
- Critical component for automated semiconductor manufacturing lines
