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AMAT 0090-06421
Product Name: Chamber Safety Interlock Sensor Assembly
Product Description: A safety module that monitors chamber door status and vacuum interlocks, ensuring safe operation of semiconductor process chambers.
Technical Specifications:
- Sensor Type: Non-contact magnetic reed switch
Detailed content
- Operating Voltage: 24V DC
- Switch Rating: 1A @ 30V DC
- Enclosure: Stainless steel, vacuum-compatible
- Temperature Range: -20°C to +85°C
- Mounting: Flange-mounted with O-ring seal
Functional Features:
- Dual-Channel Redundancy: Two independent sensors for fail-safe operation
- Vacuum Compatibility: Sealed design for high-vacuum environments
- Tamper Resistance: Secure mounting prevents bypass
- Status Indication: Built-in LED for visual status feedback
Application: Installed on all AMAT process chambers (Etch, Deposition, Implant) to enforce safety interlocks.
