Digital guide
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AMAT 0090-05154
- Product Name: MaxFilter-II Particulate Filter Assembly
- Product Description: A compact, high-efficiency particulate filter assembly designed for removing sub-micron contaminants from air and gas lines in semiconductor tool interfaces.
- Technical Specifications:
- Filtration Rating: 0.1 μm absolute efficiency.
Detailed content
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- Housing Material: Black PBT thermoplastic.
- Ports: Three 1/4″ OD push-to-connect pneumatic ports.
- Flow Rate: 50 SLPM max.
- Operating Pressure: 0 to 15 PSI.
- Operating Temperature: 0°C to 50°C.
- Functional Features:
- Multi-stage filtration for high contaminant retention.
- Low pressure drop ensuring minimal flow restriction.
- Tool-free filter element replacement.
- Lightweight and compact for easy integration.
- Resistant to moisture and common industrial chemicals.
- Application Scenarios: Installed in pneumatic systems, load locks, and EFEMs (Equipment Front End Modules) to ensure clean, particle-free air for wafer handling.
