Digital guide
You are here:
AMAT 0090-00352
Product Name: Digital Pressure / Vacuum Sensor Module
Product Description: A high-precision, solid-state pressure transducer designed for accurate measurement of vacuum and process gas pressures within semiconductor tool chambers and gas lines. It converts pressure into an analog or digital signal for system control.
Technical Specifications:
- Type: Piezoresistive or capacitance manometer.
Detailed content
- Pressure Range: Dual range, covering high vacuum (1 Torr) to positive pressure (1000 Torr).
- Output: Analog (0-10V, 4-20mA) or digital (RS-485, DeviceNet).
- Accuracy: ±0.25% full scale (FS).
- Operating Temperature: -40°C to +85°C.
- Wetted Materials: 316L stainless steel and Inconel.
Functional Features:
- Provides stable, drift-free pressure readings in harsh, corrosive environments.
- Built-in temperature compensation for consistent accuracy across thermal ranges.
- Shock and vibration resistant for reliable operation in industrial fab settings.
- Compact, rugged design for easy mounting in tight spaces.
Application Scenarios:
- Monitors chamber pressure during CVD, PVD, and Etch processes.
- Controls gas line pressure and flow in ultra-high purity (UHP) gas distribution systems.
