Digital guide
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AMAT 0051-86574
Product Name: Pneumatic Solenoid Valve Assembly
Product Description: A compact, normally-closed pneumatic solenoid valve for controlling clean, dry air or inert gas flow in semiconductor tool actuation systems.
Technical Specifications:
- Valve Type: 2-way, direct-acting solenoid
Detailed content
- Operating Pressure: 15 to 100 PSIG
- Voltage: 24V DC
- Port Size: 1/8″ compression fittings
- Seal Material: PTFE
Functional Features:
- Fast response time for precise actuation control.
- Low power consumption (4.5W) for energy efficiency.
- Hermetically sealed coil for use in harsh fab environments.
- Long cycle life (exceeding 10 million operations).
Application Scenarios: Control of pneumatic actuators for slit valves, wafer lifts, and shutters in Centura and Endura platforms.
