Digital guide
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AMAT 0051-85514
- Product Name: Pneumatic Valve Manifold Block
- Product Description: Multi-station pneumatic valve manifold block for controlling pneumatic actuators in semiconductor tooling. It integrates multiple solenoid valves into a single, compact assembly.
- Technical Specifications:
- Valve Stations: 4-station manifold
- Valve Type: 3/2-way, normally closed solenoid valves
Detailed content
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- Operating Pressure: 90-120 PSI (6.2-8.3 Bar)
- Supply Voltage: 24V DC
- Port Size: 1/8″ NPT
- Material: Anodized Aluminum 6061
- Cycle Life: >10 million cycles
- Functional Features:
- Modular design for easy valve addition/removal
- Integrated push-to-connect fittings for fast pneumatic hookup
- Individual valve status indicators (LED)
- Over-pressure safety relief valve
- Low-power consumption solenoid coils
- Compact DIN-rail mountable design
- Applications: Pneumatic control for wafer lift pins, slit valves, and chamber doors; centralized valve control for 200mm/300mm wafer handling systems.
