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AMAT 0051-16219
- Product Name: Pneumatic Solenoid Valve Manifold
- Product Description: A multi-station pneumatic manifold assembly integrating high-purity solenoid valves for controlling gas flow in semiconductor process gas panels.
- Technical Specifications:
- Valves: 8-station manifold with 2-position, 3-way normally closed solenoid valves.
Detailed content
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- Operating Pressure: 0 to 100 PSI.
- Voltage: 24V DC.
- Body Material: 316L electropolished stainless steel.
- Seal Material: FFKM (Kalrez) for extreme chemical compatibility.
- Connections: 1/4″ VCR male inlet/outlet ports.
- Functional Features:
- Consolidates multiple gas control lines into a compact footprint.
- Fast response time for precise gas switching and dosing.
- Low leak rate (<1 x 10⁻⁹ atm-cc/sec He) for UHP gas applications.
- Individual valve status indication LEDs.
- Easy maintenance with individually replaceable valve cartridges.
- Application Scenarios: Used in gas cabinets and process gas panels for controlling purge, vent, and carrier gases on Centura, Endura, and Producer platforms.
