Digital guide
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AMAT 0051-11789
- Product Name: Precision Flow Control Valve Assembly
- Product Description: A high-precision pneumatic control valve designed for ultra-clean gas delivery systems in semiconductor manufacturing. It provides accurate and stable regulation of process gas flow rates within vacuum and low-pressure environments.
- Technical Specifications:
- Material: Body constructed from 316L electropolished stainless steel; seals made from perfluoroelastomer (FFKM) for extreme chemical resistance.
Detailed content
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- Pressure Rating: Operating range from high vacuum (10-9 Torr) up to 150 PSI.
- Orifice Size: Precision-machined 1/4″ VCR-style connections.
- Actuation: Fast-response pneumatic actuation with integrated position feedback.
- Functional Features:
- Zero dead volume design minimizes particle entrapment and ensures rapid gas purging.
- Exceptional leak integrity (rate < 1 x 10-9 atm-cc/sec He) for critical process purity.
- Corrosion-resistant to all standard semiconductor process gases (e.g., NH3, SiH4, WF6).
- Compatible with integrated monitoring systems for real-time performance diagnostics.
- Application Scenarios: Primarily deployed in gas cabinets, process gas panels, and vacuum transfer lines for PVD, CVD, and Etch platforms.
