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AMAT 0050-90911 High-Temperature Flexible Hose Assembly
Product Description: A high-performance flexible hose assembly designed for high-temperature fluid and gas transfer between semiconductor equipment modules. It provides flexibility for dynamic connections while maintaining UHP purity and thermal stability in demanding process environments.
Technical Specifications:
- Inner Tube: PFA (perfluoroalkoxy) fluoropolymer
- Reinforcement: 316L stainless steel braid (double-layer)
Detailed content
AMAT 0050-90911 High-Temperature Flexible Hose Assembly
- Outer Cover: Silicone-coated fiberglass (high-temperature resistant)
- Size: 1/2″ ID (12.7mm)
- Length: 600mm (custom lengths available)
- Pressure Rating: 150 PSIG (10.3 bar)
- Temperature Range: -50°C to +260°C continuous
- End Connections: 316L stainless steel VCR fittings (1/2″)
- Leak Rate: < 1×10⁻⁹ atm·cc/s He
- Compliance: SEMI C12, RoHS, FDA food-grade (for ultra-pure applications)
Functional Features:
- Excellent flexibility for dynamic equipment connections
- High-temperature resistance for thermal process applications
- UHP purity with zero particle generation or outgassing
- Chemical compatibility with all semiconductor process fluids and gases
- Double-layer stainless steel braid for pressure containment and kink resistance
- Smooth PFA inner bore minimizes flow restriction and contamination
- Quick-disconnect VCR fittings for easy installation and replacement
Application Scenarios:
- High-temperature heat transfer fluid lines in process chambers
- Hot gas exhaust lines in etch and deposition systems
- Thermal management connections in RTP (rapid thermal processing) systems
- UHP fluid transfer in wafer cleaning and wet processing stations
- Flexible connections between chiller units and process modules
