Digital guide
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AMAT 0050-86831
- Product Name: Sensor Assembly, Pressure Transducer
- Product Description: High-precision pressure measurement assembly for vacuum and process pressure monitoring in semiconductor manufacturing equipment.
- Technical Specifications:
- Sensor Type: Piezoresistive silicon absolute pressure sensor
Detailed content
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- Measurement Range: 1 Torr to 1,000 Torr
- Accuracy: ±0.25% full scale
- Output Signal: 0-5V DC analog
- Operating Temperature: -40°C to +85°C
- Wetted Materials: 316L stainless steel, Inconel 718
- Functional Features:
- Provides accurate and stable pressure measurement in harsh vacuum environments
- Excellent chemical resistance to process gases
- High repeatability and long-term stability
- Temperature-compensated for consistent performance
- Compact design for easy integration into chamber systems
- Application Scenarios:
- Installed in AMAT Centura, Endura, and Producer process chambers
- Used for vacuum chamber pressure monitoring
- Applied in gas delivery and distribution systems
- Deployed in process control loops for deposition and etch processes
- Utilized in both low-pressure and high-pressure process environments
