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AMAT 0050-85778
Product Name: High-Purity Pneumatic Diaphragm Valve
Product Description: A normally closed, pneumatically actuated diaphragm valve for ultra-high-purity gas and chemical control in semiconductor process systems.
Technical Specifications:
- Valve Type: 2-way, normally closed, diaphragm
Detailed content
- Orifice Size: 8 mm
- Connection: 3/8″ VCR face-seal fittings
- Wetted Materials: 316L SS, PTFE, Kalrez
- Actuator Pressure: 4–7 bar
- Operating Temperature: -10°C to +120°C
- Pressure Rating: Vacuum to 150 PSIG
- Leak Rate: <1×10⁻⁹ atm-cc/sec He
- Cycle Life: >2,000,000 cycles
Functional Features:
- Zero dead volume for minimal fluid retention
- Full-flow design for low pressure drop
- Crevice-free internal bore for contamination control
- Fast actuation response (<100 ms)
- Easy diaphragm replacement for reduced maintenance time
Application Scenarios: On/off control for ultra-high-purity gases and chemicals in AMAT gas panels, chemical delivery systems, and process chambers.
