Digital guide
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AMAT 0050-80586
- Brand & Part Number: Applied Materials (AMAT) 0050-80586
- Product Name: Digital Pressure Transmitter Module
- Product Description: A high-performance digital pressure transmitter for precise pressure measurement in vacuum and process gas applications. It provides accurate, stable pressure readings with digital communication for advanced process control systems.
Detailed content
- Technical Specifications:
- Sensing Element: Silicon piezoresistive
- Pressure Range: 0.1 Torr to 100 Torr
- Accuracy: ±0.25% full scale
- Stability: ±0.1% full scale per year
- Output: RS-485 digital + 0-10V analog
- Wetted Materials: 316L stainless steel
- Operating Temperature: -10°C to +60°C
- Power Supply: 24V DC
- Functional Features:
- High-precision pressure measurement across wide vacuum range
- Excellent long-term stability minimizes calibration requirements
- Dual output interface for versatile system integration
- Temperature-compensated sensing ensures accuracy
- Hermetically sealed construction for vacuum compatibility
- Built-in diagnostic functions for predictive maintenance
- Applications:
- Chamber pressure monitoring in PVD, CVD, and etch processes
- Vacuum system pressure measurement for AMAT platforms
- Process gas line pressure monitoring
- High-vacuum semiconductor manufacturing environments
