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AMAT 0050-62843 Precision Flow Meter Assembly
Product Description: A high-precision thermal mass flow meter designed for accurate measurement and control of process gases in semiconductor manufacturing environments. It provides real-time flow data for critical gas delivery systems.
Technical Specifications:
- Measurement Principle: Thermal mass flow sensing
- Flow Range: 0–500 sccm (standard cubic centimeters per minute)
Detailed content
- Accuracy: ±1.0% full scale
- Repeatability: ±0.2% full scale
- Response Time: <100 milliseconds
- Operating Pressure: 0–100 PSIG
- Temperature Range: 0–50°C
- Output Signal: 0–5V DC analog + RS-485 digital
- Wetted Materials: 316L stainless steel, Hastelloy C-22
- Power Supply: 24V DC, 5W
Functional Features:
- Direct mass flow measurement independent of pressure and temperature variations
- Multi-gas calibration capability for common semiconductor process gases
- Digital communication for integration with factory automation systems
- Built-in self-diagnostic functions for predictive maintenance
- Zero-drift compensation ensures long-term measurement stability
- Compact design for installation in tight gas panel spaces
Application Scenarios:
- Ultra-pure gas delivery for CVD, ALD, and etch processes
- Carrier gas control in ion implantation systems
- Purge gas monitoring in load lock chambers
- Gas mixing and ratio control for specialty process recipes
- Environmental monitoring in fab sub-fab gas distribution systems
