Digital guide
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AMAT 0050-40478
Product Name: Vacuum Chamber Feedthrough Assembly
Product Description: A hermetic sealing component that transmits electrical signals, power or gas media from the atmospheric external environment into the ultra-high vacuum interior of process chambers without breaking vacuum integrity.
Technical Specifications:
- Housing Material: 316L stainless steel
Detailed content
- Seal Type: Ceramic-metal hermetic sealing structure
- Voltage Rating: Up to 5kV for power feedthroughs
- Leak Rate: ≤1×10⁻¹⁰ atm·cc/s He
- Operating Temperature: -40℃ to 150℃
Functional Features:
- Ensures complete hermetic isolation between vacuum and atmospheric environments
- Stable signal transmission with low interference and high reliability
- Resists thermal cycling and chemical corrosion in process chambers
- Compact structure for easy installation on standard chamber flanges
- Long-term stability under continuous vacuum working conditions
Application Scenarios: Used for power introduction, signal transmission and gas injection in etching, deposition, ion implantation and other vacuum process chambers.
